Title:
PREPARATION OF DIAMOND FILM
Document Type and Number:
Japanese Patent JPS63210099
Kind Code:
A
Abstract:
PURPOSE:To obtain the title homogeneous diamond film suppressing the deposition of graphite by producing an arc discharge from a carbon cathode while impressing a negative bias voltage on a substrate in a vacuum vessel wherein hydrogen, hydrocarbons, etc., are introduced. CONSTITUTION:A gas G consisting of hydrogen, an inert gas, gaseous hydrocarbons, and/or a gaseous org. compd. is introduced into a vacuum vessel 8 wherein the substrate 4 is placed. A negative bias voltage 34 is then impressed on the substrate 4 or a holder 32. An arc discharge is produced at the cathode 18 consisting of carbon, and carbon 30 is vapor-deposited on the substrate 4. As a result, a homogeneous diamond film is formed on the surface of the substrate 4.
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Inventors:
OKAMOTO KOJI
TANJIYOU MASAYASU
KAMIJO EIJI
TANJIYOU MASAYASU
KAMIJO EIJI
Application Number:
JP4386187A
Publication Date:
August 31, 1988
Filing Date:
February 26, 1987
Export Citation:
Assignee:
NISSIN ELECTRIC CO LTD
International Classes:
C30B29/04; C23C14/06; C30B23/02; (IPC1-7): C30B29/04
Attorney, Agent or Firm:
Keiji Yamamoto