PURPOSE: To prevent a basic material component from exerting an influence, by a method wherein 2W3μ or less compound, educed in a metal, is extracted by a replica film, and after a carbon is vacuum-evaporated on the compound and is secured to a metal stand having a different component from that of the educed compound, the replica film is solved and analyzed.

CONSTITUTION: In case a compound 6, educed in a metal material 3, is 2W3μ or less being below a size which is possible for electronic rays to be throttled, the metal 3 is etched with an appropriate metal corrosion solution to float up the compound 6 which is extracted with a replica film 8, such as acetylecellulose films. A carbon 9 is vacuum-evaporated to a surface where the compound 6 is adhered to the film 8, and the work is secured to a metal 11, having a different compond from that of the compound, with an adhesive agent 10. After the film 8 is solved for the removal, X-rays, produced through the irradiation with an electronic ray beam, is detected. This prevents the ground 9 of the compound 6 from exerting any influence on an X-ray analyzer, which results in enabling to perform an accurate analysis of the component element of the compound 6.