To provide a self-adhesive sheet for retaining wafer which is a repeelable adhesive sheet having good expandability, by which chipping during dicing can be reduced and which has good repeelability without the reduction with the elapse of time and useful as a wafer-retaining sheet for dicing and the like.
The self-adhesive sheet for retaining a wafer is a self-adhesive sheet comprising 3 layers, that is, a base material layer comprising a thermoplastic resin and polymer particles having a multilayered structure, an intermediate layer comprising at least one resin selected from acrylic resins, polyamide resins and ethylene-vinyl alcohol resins and having 0.5-15 m thickness, and a radiation-curing type adhesive layer. In the sheet, the amount of migration of 2-15 functional compounds having 1,000-30,000 molecular weight to the base material layer after leaving the adhesive sheet at 50C for 2 weeks is 50%.
HASHIMOTO KOICHI
JPS6254778A | 1987-03-10 | |||
JP2003003132A | 2003-01-08 | |||
JP2004214446A | 2004-07-29 | |||
JP2005303068A | 2005-10-27 | |||
JP2006049507A | 2006-02-16 | |||
JPH05235150A | 1993-09-10 | |||
JP2004330422A | 2004-11-25 | |||
JP2008050406A | 2008-03-06 | |||
JP2000223453A | 2000-08-11 | |||
JPH10335271A | 1998-12-18 | |||
JP2005116652A | 2005-04-28 | |||
JP2004079916A | 2004-03-11 | |||
JPH03205470A | 1991-09-06 |
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