Title:
圧力変化測定装置
Document Type and Number:
Japanese Patent JP6923405
Kind Code:
B2
Abstract:
To provide a pressure change measuring device which enables a precise measurement by stabilizing the pressure and/or temperature in a pressure chamber as a basis for differential pressure measurement.SOLUTION: A pressure change measuring device (1) comprises: a circuit board (3) having an opening (4); a sensor (5) having a first pressure passage hole (8), which is disposed so as to cover the opening of the circuit board; a first cavity (6) disposed at the sensor side of the circuit board, which is composed so as to form a first pressure chamber enclosing the sensor; a second cavity (7) having a second pressure passage hole (9), which is dispose at the opposite side of the sensor on the circuit board and is composed so as to form a second pressure chamber covering the opening.SELECTED DRAWING: Figure 1
Inventors:
Takeshi Uchiyama
Ocean studies
Yoko Shinohara
Ayako Nobe
Hiroshi Takahashi
Masayuki Suda
Ocean studies
Yoko Shinohara
Ayako Nobe
Hiroshi Takahashi
Masayuki Suda
Application Number:
JP2017182437A
Publication Date:
August 18, 2021
Filing Date:
September 22, 2017
Export Citation:
Assignee:
Seiko Instruments Inc.
International Classes:
G01L7/00
Domestic Patent References:
| JP6144540B1 | ||||
| JP5742323B2 |
Foreign References:
| US20160061677 |
Attorney, Agent or Firm:
Field Saki Satoshi
Shingo Suzuki
Nishizawa Kazumi
Shingo Suzuki
Nishizawa Kazumi