Title:
X-RAY CAMERA
Document Type and Number:
Japanese Patent JP3191554
Kind Code:
B2
Abstract:
PURPOSE: To obtain an X-ray transmission image of uniform brightness in microfocus X-ray camera a using a transmission type target.
CONSTITUTION: A minute convergent electron beam 1 is applied to a target formed by evaporating a tungsten film 10 thinly on beryllium leaf 11. The tungsten film 10 is cooled by a ring-shaped electron cooling element 14. An X-ray image intensifier 22 is disposed off an extension line in the direction of advance of the electron beam 1. A transmitted X-ray image of a sample 7 is detected by the X-ray image intensifier 22 and a CCD camera 24. In the thin transmission type target, a strong X ray is generated in the direction of advance of the electron beam. Since the X-ray image intensifier is disposed off the extension line in the direction of advance of the electron beam, an X ray of uniform strength enters the X-ray image intensifier. Therefore an X-ray transmission image of uniform brightness can be obtained.
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Inventors:
Hiroya Koshishiba
Application Number:
JP4831694A
Publication Date:
July 23, 2001
Filing Date:
March 18, 1994
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
G01N23/04; G01N23/22; G21K7/00; H01J35/08; (IPC1-7): G01N23/04; H01J35/08
Domestic Patent References:
| JP4326266A | ||||
| JP4144045A | ||||
| JP6237077A | ||||
| JP3186710A | ||||
| JP2138856A | ||||
| JP4262348A | ||||
| JP546881U | ||||
| JP5256778Y2 | ||||
| JP5256779Y2 |
Other References:
【文献】米国特許5629969(US,A)
Attorney, Agent or Firm:
Yasuo Sakuta