Title:
PRESSURE SENSOR ELEMENT, ITS MANUFACTURING METHOD, AND PRESSURE SENSOR
Document Type and Number:
Japanese Patent JP2009128076
Kind Code:
A
Abstract:
To provide a pressure sensor element, its manufacturing method, and a pressure sensor which is low in manufacturing costs and has superior heat resistance.
The pressure sensor element 1 uses a sinter 1a obtained by sintering a molding P made of ceramics powder. A flat closed pore 8 consisting of a pair of facing concave surfaces is provided within the sinter 1a. The closed pore 8 is formed so that the facing separation between the pair of concave surfaces narrows as they approach the peripheral edge and that the contact area between the peripheral edge of one concave surface and the peripheral edge of the other concave surface changes in accordance with pressure applied from outside the sinter 1a.
Inventors:
WAKU KIMINORI
FUKUMA YUTO
KISHIMOTO AKIRA
FUKUMA YUTO
KISHIMOTO AKIRA
Application Number:
JP2007301028A
Publication Date:
June 11, 2009
Filing Date:
November 20, 2007
Export Citation:
Assignee:
UNIV OKAYAMA
International Classes:
G01L1/20; G01L9/06
Attorney, Agent or Firm:
Juichiro Yano
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