To provide a pressure sensor element of a structure in which it is hard to restrict the distortion amount of a diaphragm portion with respect to stress received by the pressure sensor element accompanied with the deformation of a mounting substrate.
A pressure sensor element includes at least: a base body 110 formed by superimposing a first substrate 101 and a second substrate 102 forming a rectangular shape, and having four corners; a cavity portion 104 expanding substantially in parallel with the second substrate 102 by arranging a recessed portion in a center area 101A of the first substrate on a superimposed surface 110c; a diaphragm portion 102C positioned on the cavity portion 104; a gauge resistance 103 arranged on the diaphragm portion 102C; and connecting portions 106 arranged on outer edge areas of both of a first surface 110a and a second surface 110b of the base body, and connected to the gauge resistance 103. The base body 110 raises side surfaces 110d and 110e toward the mounting substrate, and so as to make one corner 110A of the four corners come close to the mounting substrate 122 rather than other corners, the connecting portions 106 are arranged in the corner 110A.
Sumio Tanai
Mitsunaga Igarashi
Toshio Komuro
Yuichiro Shimizu
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