Title:
圧力センサ及びその製造方法
Document Type and Number:
Japanese Patent JP4975265
Kind Code:
B2
Inventors:
Masahide Goto
Toshifumi Tajima
Yoshinori Iguchi
Takeshi Taiji
Toshifumi Tajima
Yoshinori Iguchi
Takeshi Taiji
Application Number:
JP2005108773A
Publication Date:
July 11, 2012
Filing Date:
April 05, 2005
Export Citation:
Assignee:
Japan Broadcasting Corporation
Panasonic Corporation
Panasonic Corporation
International Classes:
H01L29/84; G01L9/00; H04R19/00; H04R31/00
Domestic Patent References:
| JP2004356707A | ||||
| JP2004356708A | ||||
| JP2005260191A | ||||
| JP2002027595A |
Attorney, Agent or Firm:
Gunichiro Ariga