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Patent Searching and Data


Title:
PRESSURE SENSOR
Document Type and Number:
Japanese Patent JP2007121107
Kind Code:
A
Abstract:

To provide a pressure sensor with a built-in acceleration sensor, thereby separated installation of a pressure sensor and an acceleration sensor is unnecessary, while capable of enhancing wet endurance of acceleration sensor.

A lower capacitive electrode 2 and an opposite substrate capacitive electrode 6 are prepared on the facing plane of a TFT substrate 1 and an opposite substrate 5, respectively, and sealants 7 are prepared at periphery of the both substrates, which seal a space surrounded by the sealants 7 so as to have a predetermined spacing between the both substrates. An acceleration sensor 3 is built onto the upper surface of the TFT substrate 1 inside the pressure sensor, which measures the pressure imposed on the substrate from capacitance change between the lower capacitive electrode 2 and the opposite substrate capacitive electrode 6.


Inventors:
TAKAHASHI YOSHITOMO
Application Number:
JP2005313560A
Publication Date:
May 17, 2007
Filing Date:
October 27, 2005
Export Citation:
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Assignee:
NEC LCD TECHNOLOGIES LTD
International Classes:
B60C23/04; G01L9/12; G01K1/14; G01L9/00; G01P15/08; G01P15/125; H01L29/84
Domestic Patent References:
JPH0318735A1991-01-28
JP2005208043A2005-08-04
JPH08160072A1996-06-21
JPS5944875A1984-03-13
Attorney, Agent or Firm:
Masanori Fujimaki
Kimura Mitsuru