To provide a pressure sensor with a built-in acceleration sensor, thereby separated installation of a pressure sensor and an acceleration sensor is unnecessary, while capable of enhancing wet endurance of acceleration sensor.
A lower capacitive electrode 2 and an opposite substrate capacitive electrode 6 are prepared on the facing plane of a TFT substrate 1 and an opposite substrate 5, respectively, and sealants 7 are prepared at periphery of the both substrates, which seal a space surrounded by the sealants 7 so as to have a predetermined spacing between the both substrates. An acceleration sensor 3 is built onto the upper surface of the TFT substrate 1 inside the pressure sensor, which measures the pressure imposed on the substrate from capacitance change between the lower capacitive electrode 2 and the opposite substrate capacitive electrode 6.
JPH0318735A | 1991-01-28 | |||
JP2005208043A | 2005-08-04 | |||
JPH08160072A | 1996-06-21 | |||
JPS5944875A | 1984-03-13 |
Kimura Mitsuru
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