Title:
PRESSURE SENSOR
Document Type and Number:
Japanese Patent JP2019219282
Kind Code:
A
Abstract:
To provide a pressure sensor that includes a junction glass in a shape suitable for joining a pressure detection element having a plan view rectangular shape onto a surface of a diaphragm part having a toric shape in plan view.SOLUTION: In a junction glass 160, its outer periphery 165 has a shape formed, in plan view, by a first arc 161 that extends along an outer periphery 144c of a diaphragm part 144, a second arc 162 that is located inside in the radial direction with respect to the first arc 161 and extends along an inner periphery 144d of the diaphragm part 144, a first connection line 163 that connects one end 161b of the first arc 161 with one end 162b of the second arc 162, and a second connection line 164 that connects the other end 161c of the first arc 161 with the other end 162c of the second arc 162.SELECTED DRAWING: Figure 5
Inventors:
FUKUDA HIROYUKI
MISAWA SHOHEI
MISAWA SHOHEI
Application Number:
JP2018117070A
Publication Date:
December 26, 2019
Filing Date:
June 20, 2018
Export Citation:
Assignee:
NGK SPARK PLUG CO
International Classes:
G01L9/00; F02D35/00; F02P19/00; F23Q7/00; G01L23/22; H01L29/84
Attorney, Agent or Firm:
Cosmos International Patent and Trademark Office