Title:
PRESSURE SENSOR
Document Type and Number:
Japanese Patent JP2019219283
Kind Code:
A
Abstract:
To provide a pressure sensor capable of appropriately performing wire bonding to an electrode pad and appropriately detecting strain generated at a diaphragm part by a detection part of a strain gauge in the pressure sensor including a pressure detection element joined on a surface of the diaphragm part by joining glass.SOLUTION: Joining glass 160 is disposed between a rear surface 150c of a pressure detection element 150 and a surface 144a of a diaphragm part 144 in such a mode as to come into contact with a whole surface of the rear surface 150c of the pressure detection element 150, without being disposed on a surface 150b of the pressure detection element 150; is disposed in slits S in such a mode as to come into contact with the whole surfaces of slit faces 150s of the pressure detection element 150; and is disposed around a periphery of the pressure detection element 150 in such a mode as to come into contact with at least a rear-side outside surface 150g, without coming into contact with a surface-side end portion 150f out of an outside surface 150d of the pressure detection element 150.SELECTED DRAWING: Figure 8
Inventors:
FUKUDA HIROYUKI
OHORI HIROKAZU
OHORI HIROKAZU
Application Number:
JP2018117072A
Publication Date:
December 26, 2019
Filing Date:
June 20, 2018
Export Citation:
Assignee:
NGK SPARK PLUG CO
International Classes:
G01L9/00; F02D35/00; F02P19/00; F23Q7/00; G01L23/22; H01L29/84
Attorney, Agent or Firm:
Cosmos International Patent and Trademark Office