Title:
プライミング処理方法及びプライミング処理装置
Document Type and Number:
Japanese Patent JP5378586
Kind Code:
B2
Inventors:
Wakamoto Yukihiro
Takashi Takekuma
Daisuke Kondo
Takashi Takekuma
Daisuke Kondo
Application Number:
JP2012242526A
Publication Date:
December 25, 2013
Filing Date:
November 02, 2012
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
B05D3/00; B05C5/02; B05C11/10; B05D1/26
Domestic Patent References:
| JP2007237046A | ||||
| JP2005161249A | ||||
| JP2011088068A | ||||
| JP2012101219A |
Attorney, Agent or Firm:
Filial piety Sasaki