Title:
PROBE FOR BURN-IN TEST
Document Type and Number:
Japanese Patent JP2006337229
Kind Code:
A
Abstract:
To heighten the adhesive force of a probe to a supporting substrate.
The probe includes a plate-like seating area having both one end to be mounted to the supporting substrate and the other end part on its opposite side; an arm area extended in a first direction from the other end part of the seating area; a tip area protruding in a second direction intersecting with the first direction from the tip of the arm area; and a needle tip area further protruding in the second direction from the needle tip area to be in contact with electrodes of a body to be inspected. At least the seating area has a metal layer at least in one end of both surfaces in its thickness direction.
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Inventors:
SOMA AKIRA
HIRAKAWA HIDEKI
HAYASHIZAKI TAKAYUKI
TAZAWA MASAHISA
HIRAKAWA HIDEKI
HAYASHIZAKI TAKAYUKI
TAZAWA MASAHISA
Application Number:
JP2005163546A
Publication Date:
December 14, 2006
Filing Date:
June 03, 2005
Export Citation:
Assignee:
MICRONICS JAPAN CO LTD
International Classes:
G01R1/073; G01R31/26; H01L21/66
Domestic Patent References:
| JP2004340617A | 2004-12-02 | |||
| JP2002164104A | 2002-06-07 | |||
| JP2003142189A | 2003-05-16 |
Attorney, Agent or Firm:
Nobuyuki Matsunaga
Soichi Kogo
Soichi Kogo