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Title:
PROBE CARD AND INSPECTION DEVICE USING IT
Document Type and Number:
Japanese Patent JP2000266780
Kind Code:
A
Abstract:

To realize a probe card capable of reducing an. overdrive quantity capable of securing a needle pressure necessary for measurement or inspection of an electric characteristic by a probe needle, preventing side slip of the probe needle on an electrode of a test object, preventing damage or breaking of the electrode of the test object, and coping with miniaturization of the test object.

An opening 22 for marking where the head part of a marking device can be inserted is formed on a region other than an opening 21 for inspection where a probe needle 4 is projected, therefore, if a test object is miniaturized, the opening 21 for inspection is reduced to thereby shorten the length from the end fixed on a fixing part 5 of the probe needle 4 to a bent part. Hereby, an overdrive quantity capable of securing a needle pressure necessary for inspection of an electric characteristic by the probe needle 4 can be reduced. The overdrive quantity can also be reduced by shortening the length of a tapered part on the head part of the probe needle 4.


Inventors:
YATANI YOSHIAKI
Application Number:
JP7284499A
Publication Date:
September 29, 2000
Filing Date:
March 18, 1999
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G01R1/073; H01L21/66; (IPC1-7): G01R1/073; H01L21/66
Attorney, Agent or Firm:
Miyai Akio



 
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