Title:
プローブ装置
Document Type and Number:
Japanese Patent JP4910033
Kind Code:
B2
Inventors:
Kazuya Yano
Hiroshi Yamada
Masaru Suzuki
Yamamoto
Hiroshi Yamada
Masaru Suzuki
Yamamoto
Application Number:
JP2009255158A
Publication Date:
April 04, 2012
Filing Date:
November 06, 2009
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/677; H01L21/66
Domestic Patent References:
| JP2009099936A | ||||
| JP2008053550A | ||||
| JP7307372A | ||||
| JP2001203167A |
Attorney, Agent or Firm:
Patent Business Corporation Sakura International Patent Office