Title:
プローブ装置
Document Type and Number:
Japanese Patent JP5120018
Kind Code:
B2
Abstract:
A prove apparatus includes a first and a second loading port for mounting therein two carriers facing each other, a wafer transfer mechanism having a rotation center between the loading ports, and a first and a second inspection unit being symmetrical to each other and disposed in accordance with the arrangement of the loading ports. In this configuration, wafers are directly transferred between the carrier and a wafer chuck of the inspection unit by the wafer transfer mechanism. The wafer transfer mechanism has three arms for unloading two wafers from the carrier. The prove apparatus has a compact size and achieves a high throughput.
Inventors:
Shuji Akiyama
Obi Tadashi
Masaru Suzuki
Yamamoto
Kazuya Yano
Yuji Asakawa
Kazumi Yamaken
Nakamura Mogi
Eiichi Matsuzawa
Kazuhiro Ozawa
Kagami History
Shinki Kojima
Obi Tadashi
Masaru Suzuki
Yamamoto
Kazuya Yano
Yuji Asakawa
Kazumi Yamaken
Nakamura Mogi
Eiichi Matsuzawa
Kazuhiro Ozawa
Kagami History
Shinki Kojima
Application Number:
JP2008088246A
Publication Date:
January 16, 2013
Filing Date:
March 28, 2008
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/66; G01R31/28; H01L21/677; H01L21/683
Domestic Patent References:
| JP10340937A | ||||
| JP2004140084A | ||||
| JP6252030A | ||||
| JP11260764A | ||||
| JP2001250767A | ||||
| JP2101756A | ||||
| JP5333100A | ||||
| JP8083825A | ||||
| JP2005049254A |
Attorney, Agent or Firm:
Toshio Inoue