To shorten a time required for confirming a contact state between a probe pin and an electrode, and to shorten an adjustment time of a prober frame or the probe pin.

This TFT array inspection device for driving a panel by feeding a driving signal to a TFT array substrate, and inspecting the TFT array substrate by a voltage state of the panel, includes a TFT driving circuit for generating the driving signal for driving a TFT array; a prober for feeding the driving signal to the TFT array substrate in the contact state with an electrode of the TFT array substrate; and a driving waveform observation device capable of visually observing a change with time of a driving waveform of the driving signal, or a driving waveform measuring device for measuring the change with time of the driving waveform of the driving signal. The change of the driving waveform of the driving signal is determined, and an electrical contact state between the probe pin and the electrode is inspected based on the change of the driving waveform.

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