Title:
PROBE SCANNING MICROSCOPE
Document Type and Number:
Japanese Patent JPH05322552
Kind Code:
A
Abstract:
PURPOSE:To measure attraction distribution by detecting the maximum attrac tion which acts between a probe and a specimen, at the same time scanning the probe or the specimen for measuring a focus curve at each measurement point, and then storing and forming an image of attraction. CONSTITUTION:A peak detection device 11 detects the maximum attraction which acts between a probe 1 and a specimen 2. An adsorbability image storage device 12 measures the attraction distribution and forms its image according to the scanning signal in x-y directions for scanning the probe 1 or the specimen 2 and the output the device 11. Then, a focus curve is measured at each measurement point, the attraction is stored and the image is formed for measuring the adsorbability distribution. Also, a sample/hold circuit 74 for retaining a servo setting signal immediately before measuring attraction and an adder 75 for adding the output of a triangular wave generation circuit 73 which moves the actuator in z-direction and that of the circuit 74 are provided within a z-direction position control device 7a for controlling the positions of the probe 1 and the specimen 2 in z-direction, thus canceling influence when a measurement surface is tilted.
Inventors:
NANKO TOMOAKI
OYA AKIRA
OYA AKIRA
Application Number:
JP12454492A
Publication Date:
December 07, 1993
Filing Date:
May 18, 1992
Export Citation:
Assignee:
YOKOGAWA ELECTRIC CORP
International Classes:
G01B21/30; G01N13/00; G01Q60/24; G01Q60/28; H01J37/28; (IPC1-7): G01B21/30; G01N13/00; H01J37/28
Attorney, Agent or Firm:
Shinsuke Ozawa