Title:
プローブのティルト角度の調整方法及び高周波特性検査システム
Document Type and Number:
Japanese Patent JP7420378
Kind Code:
B2
Abstract:
To provide an adjusting method for adjusting a tilt angle of a probe in a non-contact manner.SOLUTION: A high frequency property inspecting system comprises: a probe including a signal terminal and a ground terminal; an analyzing part for calculating a S parameter on the basis of a signal to the probe and a signal output from the probe; and a control part for controlling the position of the probe and the tilt angle to a device to be tested mounted on mount plane. The control part searches for the tilt angle of the probe so that a period until a second S parameter in which, a distance between a first S parameter at a first reference position where the device to be tested and the probe do not contact, and a complex plane exceeds a first threshold, is calculated, and until a third S parameter is calculated, in the third S parameter, a distance between the first S parameter and the complex plane exceeds a second threshold greater than the first threshold, from a second reference position which is closer to the device to be tested relative to the first reference position and the probe does not contact the device to be tested, becomes shorter.SELECTED DRAWING: Figure 6
Inventors:
Ryosuke Sakamaki
Masahiro Horibe
Masahiro Horibe
Application Number:
JP2020026493A
Publication Date:
January 23, 2024
Filing Date:
February 19, 2020
Export Citation:
Assignee:
National Institute of Advanced Industrial Science and Technology
International Classes:
G01R27/28
Domestic Patent References:
| JP201939869A |
Foreign References:
| WO2019050001A1 |
Other References:
CAGLAYAN, Cosan ; TRICHOPOULOS, Georgios C. ; SERTEL, Kubilay,“Non-Contact Probes for On-Wafer Characterization of Sub-Millimeter-Wave Devices and Integrated Circuits”,IEEE Transactions on Microwave Theory and Techniques,2014年11月,Vol. 62,No. 11,pp. 2791-2801,DOI: 10.1109/TMTT.2014.2356176
坂巻亮;堀部雅弘,“高周波プローブのティルト角度の自動調整技術の実デバイスへの適用”,電子情報通信学会2020年総合大会講演論文集 エレクトロニクス1,2020年03月03日,p. 69
SAKAMAKI, R.,“Contactless in-situ probe planarity adjustment on co-planar devices”,2022 98th ARFTG Microwave Measurement Conference (ARFTG),2022年01月17日,DOI: 10.1109/ARFTG52954.2022.9844092
坂巻亮;堀部雅弘,“高周波プローブのティルト角度の自動調整技術の実デバイスへの適用”,電子情報通信学会2020年総合大会講演論文集 エレクトロニクス1,2020年03月03日,p. 69
SAKAMAKI, R.,“Contactless in-situ probe planarity adjustment on co-planar devices”,2022 98th ARFTG Microwave Measurement Conference (ARFTG),2022年01月17日,DOI: 10.1109/ARFTG52954.2022.9844092
Attorney, Agent or Firm:
Kazuo Harada
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