To provide a probe unit and a probe card improving the position accuracy of probe pins to an electrode group placed in a plurality of portions in a body to be inspected.
The probe pins are projecting from the tip of a plurality of bend parts 38 positioned near the electrode group of the body to be inspected 26 with bent posture individually. The probe pins 24 are constituted as a part of lead patterns 32 formed on the substrate 16 surface by a lithography technology and so the relative position accuracy of the individual probe pins is high. The connection part 30 connecting the bend part 38 is fixed to a holder 14 with a plane posture and the relative position relation of mutual base ends of the bend parts 38 is fixed in the constitution. Therefore, when the tip of the bend part is positioned near the electrode group of the body 26 by bending the bend part 39, the mutual position of the tip of each bend part 38 can be determined with high accuracy.
| JPH03230540 | MANUFACTURE OF SEMICONDUCTOR DEVICE |
HATTORI ATSUO
SAWADA SHUICHI
