To provide a probe unit improved in yield by preventing the breakage of a lead protruded from a substrate, and to provide a manufacturing method thereof.

The probe unit 1 comprises the substrate 10, a lead group 18 consisting of a plurality of leads 12 formed on the substrate so as to protrude the tip parts thereof from the substrate 10, and a protective pattern 14 formed on the substrate 10 protrusively from the substrate 10. The tip parts of the leads 12 make contact with one electrode of a subject. The protective pattern 14 is formed to protect the leads 12. The probe unit 1 may be used for a continuity test after removing the protective pattern 14. The lead group 18 and the protective pattern 14 are formed of thin films, which may be formed of the same material or not.