Title:
PROBING
Document Type and Number:
Japanese Patent JP3202577
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method which, when a plurality of electrodes are positioned with respect to associated contactors of a probe corresponding to the electrodes, can bring the contactors into reliable contact with the respective electrodes by positioning tip ends of all the contactors at centers of the associated electrodes without any need of experience or labor.
SOLUTION: Gravity centers of electrode pads provided at 4 corners of an IC chip T are found as gravity coordinate points P1 to P4. Then on the basis of these gravity coordinate points P1 to P4, a gravity center of the 4 electrode pads is found as a gravity coordinate point gravity PC of the IC chip T. Thereafter, gravity centers of probes 20A associated with the electrode pads are found as gravity coordinate points N1 to N4. Then on the basis of the gravity coordinate points N1 to N4 of the probes 20A, a gravity center of the 4 probes 20A is found as a gravity coordinate point NC of a probe card. Thereafter, the gravity coordinate point PC of the IC chip T is positioned at the gravity coordinate point NC of the probe card.
Inventors:
Shinji Akaike
Yoshihito Marumo
Yoshihito Marumo
Application Number:
JP2458696A
Publication Date:
August 27, 2001
Filing Date:
January 18, 1996
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
G01R1/06; G01R31/28; H01L21/66; G01R31/26; (IPC1-7): H01L21/66; G01R1/06; G01R31/26; G01R31/28
Domestic Patent References:
| JP7312382A | ||||
| JP5275518A | ||||
| JP4249705A | ||||
| JP8191088A | ||||
| JP6216214A | ||||
| JP5136249A |
Attorney, Agent or Firm:
Hajime Obara