PURPOSE: To measure the operations of many monitor measuring elements by a common pad by successively outputting the operative states of the monitor measuring elements to an output pad by the continuous input of a pulse signal to a selection circuit.
CONSTITUTION: This circuit detects the operations of many monitor measuring elements 1 formed in a chip 3 to judge whether an internal circuit is normally operated. These respective elements 1 are connected to a common output pad 4c through switching elements T and also connected to a selection circuit 5. These elements 1 are successively turned ON on the basis of the pulse signal continuously inputted to the respective elements T and the operative states of the elements 1 are successively outputted to the pad 4c by the circuit 5. By this method, the operations of many elements 1 can be measured by the common pad 4c and the occupying area of the pad 4c of the elements 1 is reduced and the erroneous check due to the contact inferiority of a probe and the pad 4c is prevented.
FUJITSU VLSI LTD