Title:
PROCESSING APPARATUS BY ACTIVE OXYGEN, AND PROCESSING METHOD BY ACTIVE OXYGEN
Document Type and Number:
Japanese Patent JP2023020953
Kind Code:
A
Abstract:
To provide a processing apparatus by active oxygen capable of more efficiently processing the surface of an object to be processed, and a processing method by active oxygen capable of more efficiently processing the surface of an object to be processed.SOLUTION: A processing apparatus by active oxygen includes: an ultraviolet light-permeable member; and a first chamber and a second chamber adjacent each other with the ultraviolet light-permeable member therebetween, where the first chamber can house an object to be processed, and has an ozone generator, the second chamber has an ultraviolet light source, the ultraviolet light source can irradiate the surface of the object to be processed housed in the first chamber with ultraviolet light, and the distance between the ultraviolet light-permeable member and the surface of the object to be processed is adjustable to 10 mm or nearer. A processing method by active oxygen is also provided.SELECTED DRAWING: Figure 1
Inventors:
FURUKAWA TAKUMI
OZAWA MASAKI
YAMAUCHI KAZUHIRO
TAKASHIMA KENJI
GOTO TOSHO
KANEKO SHOTA
OZAWA MASAKI
YAMAUCHI KAZUHIRO
TAKASHIMA KENJI
GOTO TOSHO
KANEKO SHOTA
Application Number:
JP2022112933A
Publication Date:
February 09, 2023
Filing Date:
July 14, 2022
Export Citation:
Assignee:
CANON KK
International Classes:
B01J19/12; A61L2/10; A61L2/20; C01B13/02
Attorney, Agent or Firm:
Patent Attorney Corporation Shuwa Patent Office
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