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Title:
PROCESSING APPARATUS
Document Type and Number:
Japanese Patent JP2014024151
Kind Code:
A
Abstract:

To provide a processing apparatus which facilitates input of necessary information for processing a workpiece with the processing apparatus, and which can reduce the risk of damage to the workpiece and the processing apparatus due to erroneous input by an operator.

A processing apparatus for processing a workpiece includes: holding means for holding the workpiece; processing means for processing the workpiece held by the holding means; control means for controlling the processing means; and reading means for reading an information code having processing condition information for processing the workpiece. The control means causes the processing means to operate on the basis of the processing condition information read by the reading means.


Inventors:
FUJI YASUYUKI
TANAKA HIDEAKI
UCHIDA FUMIO
ONO KATSUTOSHI
TATEISHI TOSHIYUKI
Application Number:
JP2012165772A
Publication Date:
February 06, 2014
Filing Date:
July 26, 2012
Export Citation:
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Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B49/10; H01L21/301
Domestic Patent References:
JP2009083016A2009-04-23
JP2003242469A2003-08-29
JP2001144034A2001-05-25
JP2009194326A2009-08-27
JP2009083016A2009-04-23
JP2003242469A2003-08-29
Attorney, Agent or Firm:
Akira Matsumoto
Hiroshi Oue