Title:
PROCESSING DEVICE AND DETERMINATION METHOD OF WORKPIECE
Document Type and Number:
Japanese Patent JP2023081008
Kind Code:
A
Abstract:
To provide a processing device capable of preventing an error processing of a processed material.SOLUTION: A processing device for processing a processed material, comprises: a chuck table having a holding surface that holds the processed material; an imaging unit that images the processed material held by the holding surface; a processing unit that processes the processed material held by the holding surface; and a control unit. The control unit determines whether or not a structure of the processed material is formed on the basis of a result obtained by imaging the processed material by the imaging unit.SELECTED DRAWING: Figure 1
Inventors:
ARAKI KOJI
TANAKA TAKAMITSU
TANAKA TAKAMITSU
Application Number:
JP2021194642A
Publication Date:
June 09, 2023
Filing Date:
November 30, 2021
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/301; B23Q17/09; B23Q17/24; B24B27/06; B24B49/12; H01L21/66
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato