Title:
PROCESSING DEVICE USING PLASMA GENERATED INSIDE BUBBLE
Document Type and Number:
Japanese Patent JP2017117645
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a processing device using plasma generated inside bubbles, capable of easily generating plasma inside bubbles in a liquid and easily improving modification efficiency of an object to be modified.SOLUTION: A processing device using plasma generated inside bubbles according to an embodiment includes: a passage for circulating a liquid; a bubble generating section provided to the passage and generating a plurality of bubbles in the liquid by decompressing the liquid; and an electromagnetic wave irradiation section irradiating the bubbles with an electromagnetic wave to generate plasma to the inside of the bubbles.SELECTED DRAWING: Figure 1
Inventors:
KOBAYASHI SHINJI
MATSUNAGA KENTARO
MATSUNAGA KENTARO
Application Number:
JP2015251793A
Publication Date:
June 29, 2017
Filing Date:
December 24, 2015
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
H05H1/24; B01F1/00; B01F3/04; B01F5/02; B01J19/08
Attorney, Agent or Firm:
Patent Business Corporation Sakura International Patent Office