Title:
PROCESSING DEVICE WITH SHUTTER
Document Type and Number:
Japanese Patent JP2023054962
Kind Code:
A
Abstract:
To prevent a hand of a worker from being caught when closing a shutter provided in an opening of an external cover.SOLUTION: A processing device comprises: a chuck table which can hold a workpiece; a processing unit which processes the workpiece held by the chuck table; and a feeding unit which relatively moves the chuck table and the processing unit. The processing device processes the workpiece with the processing unit while relatively moving the chuck table holding the workpiece and the processing unit by operating the feeding unit. The processing device further comprises: an external cover which covers the chuck table and the processing unit and in which an opening for connecting inner and outer spaces with each other is formed; a shutter which opens/closes the opening of the external cover; an open button which opens the opening by moving the shutter; and a close button which closes the opening by moving the shutter. Only when the close button is pressed, the closing operation of the shutter is performed.SELECTED DRAWING: Figure 4
Inventors:
NAKANO SHOTA
YAMANAKA SATOSHI
YAMANAKA SATOSHI
Application Number:
JP2021164010A
Publication Date:
April 17, 2023
Filing Date:
October 05, 2021
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B23Q11/08; B23Q7/10; B24B7/04; B24B55/00; B24B55/06; H01L21/677
Attorney, Agent or Firm:
Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
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