Title:
PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2019181584
Kind Code:
A
Abstract:
To effectively use a coolant used in a spindle housing for cooling of the spindle housing.SOLUTION: A processing device includes: a chuck table which holds a workpiece; a spindle to which a grinder tool for processing the workpiece held by the chuck table is attached; a spindle housing which rotatably supports the spindle and includes a coolant passage; a processing water nozzle which jets processing water for removing processed waste occurring from the workpiece from the workpiece; a housing cleaning water nozzle which jets cleaning water for removing the processed waste adhering to the spindle housing; a water supply passage which is connected to the coolant passage and supplies a coolant to the coolant passage; a drain passage which is connected with the coolant passage and drains the coolant that has flowed through the coolant passage; and a branch drain supply passage which is branched from the drain passage and supplies a part of the coolant to at lease one of the processing water nozzle and the housing cleaning water nozzle.SELECTED DRAWING: Figure 5
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Inventors:
SEO JUN YOUNG
Application Number:
JP2018071484A
Publication Date:
October 24, 2019
Filing Date:
April 03, 2018
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B23Q11/00; B23Q11/12; B24B27/06; B24B41/04; B24B55/02; B24B55/06; H01L21/301
Domestic Patent References:
| JPS5627761A | 1981-03-18 | |||
| JP2017127910A | 2017-07-27 | |||
| JP2000117521A | 2000-04-25 | |||
| JPH0426708U | 1992-03-03 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Kasahara Takahiro
Tomohiro Okamoto
Kasahara Takahiro