Title:
PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2021167032
Kind Code:
A
Abstract:
To provide a processing device with reduced disperse of cut powder and misty cutting water to an upper position of an attachment/detachment area.SOLUTION: A processing device comprises: a cassette placing unit; a chuck table 12; a processing unit; a processing chamber cover 22; a cleaning unit; a table mobile mechanism 14 for moving the chuck table 12 between an attachment/detachment area A positioned between the cleaning unit and the cassette placing unit and a processing area B neighboring the attachment/detachment area A; a transportation mechanism for transporting a workpiece 11 between the chuck table 12 arranged in the attachment/detachment area and a spinner table and between the chuck table 12 arranged in the attachment/detachment area A and a storage cassette; a shutter 30 for closing the attachment/detachment area A in a covering manner and opening the attachment/detachment area A in an exposing manner; and a control unit for controlling open/close of the shutter 30.SELECTED DRAWING: Figure 3
Inventors:
MINATO KOKICHI
NAKANISHI YUJI
PAUL VINCENT ATENDIDO
NAKANISHI YUJI
PAUL VINCENT ATENDIDO
Application Number:
JP2020070791A
Publication Date:
October 21, 2021
Filing Date:
April 10, 2020
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B55/06; B23Q11/08; B24B27/06; B24B41/06; H01L21/301; H01L21/304
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Kasahara Takahiro
Ei Okamoto
Takayuki Okano
Tomohiro Okamoto
Kasahara Takahiro
Ei Okamoto
Takayuki Okano