Title:
PROCESSING DEVICE, CLEANING METHOD, AND PLATE FOR CLEANING
Document Type and Number:
Japanese Patent JP2023140627
Kind Code:
A
Abstract:
To provide a processing device which can clean a holding surface for holding a work-piece without relying on a dedicated cleaning mechanism.SOLUTION: A processing device comprises: a holding unit including a chuck table which has a first holding surface for holding a work-piece; a processing unit; a cassette mounting table on which a cassette capable of accommodating a tabular plate for cleaning, on a first surface side of which an uneven structure is provided, is placed; a transportation unit including a holding pad; and a control unit which can control the holding unit and the transportation unit according to a program stored in a storage device. The control unit executes, according to the program, procedure for holding a second face of the plate for cleaning by the holding pad, a procedure for pressing the first surface of the plate for cleaning against the first holding surface of the chuck table in the state that the plate for cleaning is held by the holding pad, and a procedure for rotating the chuck table when pressing the first surface of the plate for cleaning against the first holding surface of the chuck table.SELECTED DRAWING: Figure 4
Inventors:
FUJISAKI SATOSHI
HARADA SHIGENORI
MATSUZAWA MINORU
HARADA SHIGENORI
MATSUZAWA MINORU
Application Number:
JP2022046556A
Publication Date:
October 05, 2023
Filing Date:
March 23, 2022
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B23Q11/00; B08B5/04; B23Q3/08; B23Q7/04; B24B41/06; B24B55/06; H01L21/683
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato