Title:
加工装置
Document Type and Number:
Japanese Patent JP5695387
Kind Code:
B2
Inventors:
Kunimitsu Takahashi
Application Number:
JP2010227377A
Publication Date:
April 01, 2015
Filing Date:
October 07, 2010
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B23B1/00; H01L21/304
Domestic Patent References:
| JP62166901A | ||||
| JP58069745A | ||||
| JP2007301672A | ||||
| JP2010179393A | ||||
| JP2009509770A |
Attorney, Agent or Firm:
Isao Sasaki
Kyoko Kawamura
Ken Kubo
Kyoko Kawamura
Ken Kubo