Title:
Processing equipment
Document Type and Number:
Japanese Patent JP6327952
Kind Code:
B2
Inventors:
Hideaki Otani
Mirei Hida
Tag Masaki
Tomoharu Kihara
Katsuhiko Sekiya
Mirei Hida
Tag Masaki
Tomoharu Kihara
Katsuhiko Sekiya
Application Number:
JP2014111361A
Publication Date:
May 23, 2018
Filing Date:
May 29, 2014
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B45/00; B24B7/02; B24B27/06
Domestic Patent References:
| JP2013222834A | ||||
| JP4105850A | ||||
| JP2013233613A | ||||
| JP4331045A | ||||
| JP2013099797A |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Tomohiro Okamoto