Title:
処理液の製造装置、製造方法及び基板の処理装置
Document Type and Number:
Japanese Patent JP4417642
Kind Code:
B2
Abstract:
PURPOSE: An apparatus for fabricating process liquid is provided to precisely control the flowrates of various kinds of liquids and mix the liquids of a desired quantity by respectively decompressing the various kinds of liquids at each predetermined pressure while making the decompressed liquid loaded. CONSTITUTION: A plurality of supply parts(4,5,6) supply various kinds of liquids. One end of a plurality of supply pipes(1,2,3) is connected to each supply part. A plurality of decompressing valves(11,24,34) decompress the liquid supplied from each supply part to each supply pipe at a predetermined pressure, installed in each intermediate part of each supply pipe. An orifice(12,25,35) loads each liquid decompressed by each decompressing valve at a predetermined pressure, installed in the downstream side of each decompressing valve. The other end of each supply pipe is connected to a mixing tank(14) in which each liquid controlled to be a predetermined flowrate by the decompressing valve and the orifice is introduced and mixed.
Inventors:
Koichi Hamada
Sadaaki Kurokawa
Toshihiro Meguro
Sadaaki Kurokawa
Toshihiro Meguro
Application Number:
JP2003072111A
Publication Date:
February 17, 2010
Filing Date:
March 17, 2003
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
B01F15/04; B08B3/08; B01J4/00; C11D7/06; C11D7/18; C11D7/32; H01L21/02; H01L21/304; H01L21/306
Domestic Patent References:
| JP11076906A |
Attorney, Agent or Firm:
Takehiko Suzue
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Sadao Muramatsu
Ryo Hashimoto