処理液供給装置

Japanese Patent JP6808960

B2

PROBLEM TO BE SOLVED: To improve the degree of freedom of usable material of an electrode in an electric dust collector provided with a first electrode and a second electrode which are opposed to each other and allow a part between both electrodes to be constituted as a channel of processing liquid.SOLUTION: An electric dust collector is constituted so as to be provided with: a first electrode and a second electrode; an insulating support member which divides a channel together with the first electrode and the second electrode and is interposed between respective peripheral parts of the first electrode and the second electrode; an inflow port and an outflow port of processing liquid provided so as to be directed to the channel; and a planar body for a first conductive path and a planar body for a second conductive path which are laminated on the outer surface side of the first electrode and the outer surface side of the second electrode respectively, for electrically connecting a power source part and, the first electrode and the second electrode respectively. Thereby, contact area between the electrode and the conductive path can be increased and contact resistance can be decreased, therefore, electric field intensity is secured and the degree of freedom of selection of material of electrode is improved.SELECTED DRAWING: Figure 4

JP2002045860	FOREIGN MATTER REMOVING AND WATER CLEANING DEVICE
JPH0738980	METHOD OR GENERATING INFRARED RAY REMOTE CONTROL TRANSMISSION SIGNAL
JPS5864146	OIL PURIFYING APPARATUS OF HYDRAULIC MACHINE

Tsuru Toyohisa Ta
Yoshishi Hamada
Hiroki Shibata

JP2016082210A

January 06, 2021

April 15, 2016

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東京エレクトロン株式会社

B03C5/02; G03F7/16; H01L21/027

JP2005181190A
JP2000505545A
JP10043762A
JP4214886A

EP1113266A1
WO2013157366A1
CN104781450A
KR1032324B1

Patent Corporation Yayoi Patent Office
Toshio Inoue
Tomoaki Miida

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