Title:
PROCESSING METHOD FOR BROMOFLUOROALKENE-CONTAINING GAS AND PROCESSING UNIT FOR BROMOFLUOROALKENE-CONTAINING GAS
Document Type and Number:
Japanese Patent JP2017047338
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method capable of processing bromofluoroalkene-containing gas under a mild condition without requiring a complicated operation.SOLUTION: Bromofluoroalkene in bromofluoroalkene-containing gas is processed by bringing the bromofluoroalkene-containing gas into contact with a physical adsorbent.SELECTED DRAWING: Figure 1
Inventors:
TOKUURA SHIZUO
YOSHIDA TAKASHI
HOTTA KAZUHIKO
YURIZONO HIDETSUGU
YOSHIDA TAKASHI
HOTTA KAZUHIKO
YURIZONO HIDETSUGU
Application Number:
JP2015170077A
Publication Date:
March 09, 2017
Filing Date:
August 31, 2015
Export Citation:
Assignee:
UBE INDUSTRIES
International Classes:
B01D53/02; B01D53/04; B01D53/70; B01D53/81; H01L21/3065
Attorney, Agent or Firm:
Kazutoshi Nakayama