PURPOSE: To provide a processing method for a ceramic green sheet of low cost and superior productivity to be performed easily by anybody.

CONSTITUTION: A base film 5 forming a ceramic green sheet 6 of thickness of 25μm is clamped between a guide plate 1 with a plurality of through-holes 2 of 0.2mm and a support plate 3 with smooth surface by the green sheet 6 and the guide plate l bonded together and the base film 5 and the support plate 3 bonded together. Then, compressed water is jetted out from below the guide plate 1 toward through-holes 2 of the guide plate 1 by a water jet nozzle 4. The ceramic green sheet 6 located under through-holes 2 is broken by jetting the compressed water toward the through-holes 2, and the broken green sheet 6 is removed together with the return water hitting the base film 5 and splashing back, and through-holes of 0.2mm are formed on the ceramic green sheet 6.