Title:
被加工物の加工方法
Document Type and Number:
Japanese Patent JP7460386
Kind Code:
B2
Abstract:
A processing method for a workpiece includes a cutting step of cutting the workpiece along streets by a cutting blade having a V-shaped tip end, to form V grooves of which shallower parts are wider than deeper parts, and a cleaning step of cleaning a back surface of the workpiece with cleaning water, after the cutting step is carried out.
Inventors:
Naoko Yamamoto
Application Number:
JP2020023126A
Publication Date:
April 02, 2024
Filing Date:
February 14, 2020
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; B24B27/06; B24B41/06; B24B49/12; B24B55/06; H01L21/304
Domestic Patent References:
| JP2013161944A | ||||
| JP2010087141A | ||||
| JP2015109381A | ||||
| JP2001319899A | ||||
| JP2009200422A | ||||
| JP2006024586A |
Attorney, Agent or Firm:
Hiroshi Ogami