加工システム及び加工装置

Japanese Patent JP7166727

B2

To provide a processing system capable of grasping in a short period of time relation between a measurement value measured in processing an object to be processed and a processing defect of the object to be processed.SOLUTION: The processing system comprises: a function unit including a chuck table comprising a holding surface and a processing unit; a measurement unit for acquiring a measurement value; a measurement value storage section for storing a plurality of measurement values acquired at a plurality of different points of time; a coordinate storage section for storing a plurality of coordinates each representing positions of the processing unit with respect to the holding surface at the plurality of different points of time; a color setting storage section for storing color settings representing relation between the magnitudes of the measurement values and colors; an image generation section that from the measurement values stored in the measurement unit, the coordinates stored in the coordinate storage section, and the color settings stored in the color setting storage section, generates an image having a plurality of positions which correspond to the plurality of coordinates and to which colors representing the magnitudes of measurement values corresponding to the plurality of coordinates are applied; and a display unit for displaying the image.SELECTED DRAWING: Figure 1

Yohei Yamada
Arao Kazuki

JP2018229367A

November 08, 2022

December 06, 2018

Click for automatic bibliography generation  

Disco Co., Ltd.

H01L21/68; B23Q11/00; B23Q17/00; B23Q17/09; B23Q17/24; B24B49/00; H01L21/301

JP2016219756A
JP2016036040A
JP2008004806A

Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano

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