Title:
PROCESSING UNIT AND PROCESSING UNIT STRUCTURE BODY
Document Type and Number:
Japanese Patent JP3249395
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To use space effectively by piling up processing blocks which performs a single process in vertical direction for constituting a processing unit wherein a series of processes are performed with such board-like workpiece as a semiconductor wafer and glass substrate and a processing device comprising the processing units provided in series.
SOLUTION: A processing device structure body 1 is constituted by providing a plurality of processing units 2... laterally in series, and a transportation part 3 is provided on the top part of each processing unit 2, and such transportation device as a shuttle(SH) provided in the transportation part 3 enables sending/ receiving of a board-like workpiece material between adjoining processing units. The processing unit 2 comprises processing blocks 4 and 4 and a transfer robot(R) assigned between the processing blocks 4 and 4, in addition, each processing unit 2 is independent of each other so that increase/decrease is allowed against the processing device structure body 1.
Inventors:
Hidenori Miyamoto
Susumu Okano
Koji Ueda
Taiichiro Aoki
Susumu Okano
Koji Ueda
Taiichiro Aoki
Application Number:
JP16151796A
Publication Date:
January 21, 2002
Filing Date:
June 21, 1996
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
H01L21/677; B23P21/00; B23Q7/10; B23Q7/14; B23Q37/00; B23Q41/02; B23Q41/04; H01L21/00; (IPC1-7): H01L21/68
Domestic Patent References:
| JP846010A | ||||
| JP794572A | ||||
| JP1241840A | ||||
| JP63229836A | ||||
| JP8162514A | ||||
| JP9275127A | ||||
| JP728962U |
Attorney, Agent or Firm:
Yu Oyama (1 person outside)