Title:
PROCESSING WATER REGENERATOR
Document Type and Number:
Japanese Patent JP2023063801
Kind Code:
A
Abstract:
To keep power consumption and water consumption of factory equipment low when using a processing water regenerator.SOLUTION: There is provided a processing water regenerator 8, including: a waste liquid treatment device 1 for treating waste liquid L discharged from a processing device 4 for processing a workpiece 90 using processing water; and a fuel cell device 3 that chemically reacts hydrogen and oxygen to produce electricity and water. The waste liquid treatment device 1 includes a hydrogen generation unit 5 that has a positive electrode 51 and a negative electrode 52 in a tank 50 for storing the waste liquid L, and generates hydrogen by supplying power to the positive electrode 51 and the negative electrode 52. The fuel cell device 3 chemically reacts hydrogen generated by the hydrogen generation unit 5 with oxygen in the air to generate electricity and water for use in the processing device 4.SELECTED DRAWING: Figure 1
Inventors:
SAITO YOSHINOBU
Application Number:
JP2021173823A
Publication Date:
May 10, 2023
Filing Date:
October 25, 2021
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
C02F1/48; B03C5/02; B23Q11/00; B23Q11/10; B24B55/03; C25B1/04; C25B9/00; C25B9/60; H01L21/304; H01M8/00; H01M8/04; H01M8/0656
Attorney, Agent or Firm:
Patent Attorney Corporation Tokyo Alpa Patent Office
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