Title:
PROCESSOR USING ORGANIC SOLVENT
Document Type and Number:
Japanese Patent JPH01200420
Kind Code:
A
Abstract:
PURPOSE:To always set the composition ratio of a mixture solution at the initial set value and to improve the safety by detecting the specific gravity of the mixture solution by a specific gravity sensor and supplying automatically the noncombustible solution into a processing container based on the detected specific gravity when the inflammable organic solvent and the noncombustible solution which reduces the degree of inflammability of said organic solvent are put into the processing container. CONSTITUTION:An inflammable organic solvent 4 and a noncombustible solution 13 such as chlorofluorocarbon-113, etc., are put into a processing container 11 based on a set composition ratio. A specific gravity sensor 15 is put into the container 11 and moved to a float switch 15b set at the upper part of the container 11 when the specific gravity of the mixture solution has a change with time. Thus, the switch 15b is turned on and a supply device 12 is actuated by a controller 14. Then, the solution 13 is put into the container 11. In such a way, the safety of a wafer processing solution is maintained. This device can also be applied to other processors using the organic solvent in addition to a wafer processor.
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Inventors:
MUKOGAWA YASUKAZU
Application Number:
JP2601788A
Publication Date:
August 11, 1989
Filing Date:
February 05, 1988
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
G05D11/02; H01L21/027; H01L21/30; H01L21/304; (IPC1-7): G05D11/02; H01L21/30; H01L21/304
Attorney, Agent or Firm:
Masuo Oiwa (2 outside)