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Title:
PRODUCTION OF ACTIVE MATRIX IMAGE DISPLAY PANEL
Document Type and Number:
Japanese Patent JPH05326953
Kind Code:
A
Abstract:

PURPOSE: To provide the stable and easy production of an active matrix image display panel which allows excellent image quality and response speed.

CONSTITUTION: An active matrix image display panel is provided with a switching element arranged in matrix in response to the picture element density and a drive circuit which drives the switching element on the same glass board 3. After forming a polysilicon layer, an activating layer 42 is formed for the drive circuit by etching and after forming an amorphous silicon layer, an activating layer 52 for the switching element is formed by etching. Thus, the reduction of the off-current of a transistor for the switching element and the high mobility of the transistor in the drive circuit are allowed at the same time.


Inventors:
KONO NAOTAKE
KAKIGI HISASHI
Application Number:
JP9665191A
Publication Date:
December 10, 1993
Filing Date:
April 26, 1991
Export Citation:
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Assignee:
TONEN CORP
International Classes:
G02F1/136; G02F1/1368; H01L29/78; H01L29/786; (IPC1-7): H01L29/784; G02F1/136
Attorney, Agent or Firm:
Kohei Kubota (1 person outside)



 
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