Title:
PRODUCTION OF COLOR SEPARATION FILTER
Document Type and Number:
Japanese Patent JPH01133001
Kind Code:
A
Abstract:
PURPOSE:To improve accuracy and to reduce cost by subjecting plural kinds of multi-layered interference films repeatedly to a stage for forming an arbitrary kind of multi-layered interference film, then removing the multi-layered interference films except the necessary parts which are made to remain. CONSTITUTION:The 1st kind of multi-layered interference film 2 is formed on a solid-state image pickup element 1 and a resist 3 is coated thereon; thereafter, the resist 3 is patterned to leave only the desired parts. Multi-layered interference films 2a are then etched with the resist 3 as a mask in such a manner that only the desired parts thereof remain. The resist 3 is removed to form a multi-layered interference film filter 2a, following which an intermediate protective layer 4 is formed. This stage is repeated with the 2nd and 3rd kinds of multi-layered interference films to form multi-layered interference film filters 2a-2c in the respective positions. The entire part is coated with a protective film 5 to complete the color sepn. filter. Accuracy is thereby improved and cost is reduced.
Inventors:
AKINO YUTAKA
Application Number:
JP28946487A
Publication Date:
May 25, 1989
Filing Date:
November 18, 1987
Export Citation:
Assignee:
CANON KK
International Classes:
H04N9/04; G02B5/20; H01L27/14; (IPC1-7): G02B5/20; H01L27/14; H04N9/04
Attorney, Agent or Firm:
Yamashita