To produce an elastic pile woven fabric by subjecting ground yarns to a diameter-arranging work and a weaving work without applying a tension to the ground yarns.

An elastic ground yarn 1 is dipped in a sizing agent in a heated pot 2 in an extended state, and subsequently wound up on a pressing and winding beam 5. The sized ground yarn 1 is pressed with press rollers 3 in the extended state, wound on a heated cylinder 4, dried and subsequently wound on the winding beam 5. The sized warps 1 are woven as warps with wefts into woven fabric. The produced woven fabric is, if necessary, sewed with a sewing machine and subsequently subjected to the removal of the sizing agent from the warps. The sizing agent-removed warps contract to give the elastic pile woven fabric.