Title:
PRODUCTION OF HIGH ALPHA-TYPE HIGHLY PURE SILICON NITRIDE POWDER
Document Type and Number:
Japanese Patent JPH06219715
Kind Code:
A
Abstract:
PURPOSE: To simply and surely obtain a high α-type highly pure silicon nitride powder.
CONSTITUTION: The method for producing silicon nitride powder having an α-form content of ≥90wt.% by directly reacting metallic silicon powder with nitrogen in the presence of calcium oxide comprises using metallic silicon powder having an metal impurity content of 5-20μm, an oxygen content of 0.1-0.4wt.% and an average particle diameter of 5-20μm as the metallic silicon powder and further adding calcium oxide in an amount of 0.2-0.7 pts.wt. per 100 pts.wt. of the metallic silicon powder.
Inventors:
KUWABARA HARUYOSHI
OTSUKA AKIO
MAKI YASUYUKI
SHINDO TOSHIHIKO
OTSUKA AKIO
MAKI YASUYUKI
SHINDO TOSHIHIKO
Application Number:
JP3421293A
Publication Date:
August 09, 1994
Filing Date:
January 29, 1993
Export Citation:
Assignee:
SHINETSU CHEMICAL CO
International Classes:
C01B21/068; C01C1/04; (IPC1-7): C01B21/068
Attorney, Agent or Firm:
Takashi Kojima