PRODUCTION OF ITO SINTERED COMPACT - MITSUBISHI MATERIALS CORP

Title:

PRODUCTION OF ITO SINTERED COMPACT

Document Type and Number:

Japanese Patent JPH07331425

Kind Code:

A

Abstract:

PURPOSE: To efficiently produce a high density ITO sintered compact at a relatively low firing temp. in a short time.

CONSTITUTION: When a mixture of an indium compd. with a tin compd. is compacted and fired in an oxygen atmosphere to produce an ITO sintered compact, part of the oxygen of the firing atmosphere is ozonized and firing is carried out in an oxygen atmosphere contg. 1,000ppm to 20% ozone. It is preferable that a tubular furnace is used as a firing furnace and the atmospheric gas is continuously circulated. Since the progress of a decomposition reaction of SnO2 is more surely prevented by the high oxidizing power of ozone as compared with firing in an O2 atmosphere, sinterability is improved and the objective high density ITO sintered compact is obtd.

Inventors:

SASAKI TAKEO
SASAKI HIROSHI
TAKASHINA HIROYUKI

Application Number:

JP31646294A

Publication Date:

December 19, 1995

Filing Date:

December 20, 1994

Export Citation:

Click for automatic bibliography generation Help

Assignee:

MITSUBISHI MATERIALS CORP

International Classes:

C04B35/00; C04B35/457; C04B35/495; C23C14/34; (IPC1-7): C23C14/34; C04B35/457; C04B35/495

Attorney, Agent or Firm:

Tsuyoshi Shigeno

Previous Patent: Piezoelectric elements, liquid ejection heads, and printers

Next Patent: METHOD FOR JOINING SPUTTERING TARGET MATERIAL