Title:
PRODUCTION OF MAGNETIC THIN FILM OF OXIDE
Document Type and Number:
Japanese Patent JPS56164019
Kind Code:
A
Abstract:
PURPOSE: A ferrocene gas is blown together with an oxidative carrier gas to the base plate to form a thin film on the plate, then the reduction and oxidation of the thin film are effected to form the objective γ-hematite film capable of high-density recording.
CONSTITUTION: Fe(C6H5)2 (ferrocene) is sublimed by heating and the resulting gas is blown together with a carrier gas of oxygen through a nozzle to the base plate kept to about 350W600°C. The ferrocene, coming into contact with the base plate, is pyrolyzed to form a thin film of iron oxide on the base plate. The thin film is heat treated in a hydrogen-gas atmosphere, then in the air to form γ-hematite (γ-Fe2O3).
More Like This:
Inventors:
HATSUTORI MASUZOU
SATOU TOMU
SATOU TOMU
Application Number:
JP6938980A
Publication Date:
December 16, 1981
Filing Date:
May 23, 1980
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
C01G49/02; H01F41/14; (IPC1-7): C01G49/02; H01F41/14
Domestic Patent References:
| JP38026261A | ||||
| JPS509799A | 1975-01-31 | |||
| JPS5265898A | 1977-05-31 |