Title:
PRODUCTION METHOD OF CERAMIC THIN FILM
Document Type and Number:
Japanese Patent JP2015142877
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a production method of ceramic thin film by using a liquid phase method, without being participated by an organic component such as an organic polymer and alcohol.SOLUTION: A shaped base material is immersed in a solution of metal salt of inorganic acid such as SnCl-5HO, and TiOSO, and then the base material is pulled from the solution under atmosphere of 20°C or more and 70°C or less at speed of 1.0 cm/min or less, therefore a ceramic precursor membrane is formed on the base material, and the ceramic thin membrane is obtained by burning the ceramic precursor membrane. The production method comprises the above-mentioned steps performed in the order.
Inventors:
UCHIYAMA HIROAKI
YUKITSUKA HIROMITSU
ITO SHUN
SASAKI RYOSUKE
YUKITSUKA HIROMITSU
ITO SHUN
SASAKI RYOSUKE
Application Number:
JP2014016445A
Publication Date:
August 06, 2015
Filing Date:
January 31, 2014
Export Citation:
Assignee:
UNIV KANSAI
International Classes:
B05D7/24; B05D1/18; B05D3/02; C03C17/25
Attorney, Agent or Firm:
Masayuki Yano