To suppress or prevent deterioration of a substrate when producing a hydrogen permeable membrane having a proton-conductive electrolyte membrane.

The substrate 10 for producing the hydrogen permeable membrane 100 is prepared, and a protective layer 20 is formed on one surface of the substrate 10 placed on a pedestal 210 in an apparatus 200. The protective layer 20 can be formed by, for example, the PVD method or CVD method in a non-oxygen atmosphere having no oxygen. After heating the inside of the apparatus up to a given temperature, the protective layer 20 is removed. Then oxygen is introduced into the apparatus 200 and an electrolyte layer 30 is formed on the substrate 10. The PVD method or CVD method is used for forming the electrolyte layer 30.